Modeling, Simulation, and Analysis of Novel Threshold Voltage Definition for Nano-MOSFET

Table 1

Comparison of V_TH extraction methods for 10 nm test device.

Method	VDS	VTLIN
Hybrid extrapolation extraction method	0 V	0.67 V
Linear extrapolation method (LEM)	0.1 V	0.68 V
Second derivative method (SDM)	0.1 V	0.675 V
Ghibaudo method (GM)	0.1 V	0.6 V
Match point method (MPM)	0.1 V	0.65 V