Collimated Magnetron Sputter Deposition for Mirror Coatings

Table 1

The solid angle spanned by the honeycomb mesh mounted the distance mm from the target.

Mesh type	1	2	3	4	5	6
Mesh thickness (mm)	10	10	10	5	5	5
Cell diameter (mm)	6.4	9.6	12.8	6.4	9.6	12.8
Solid angle (st.rad.)	0.32	0.61	0.88	0.92	1.4	1.8
,	31	41	48	49	58	64
, defined by (1),	31	41	48	48	57	62