Collimated Magnetron Sputter Deposition for Mirror Coatings

Figure 7

The angular distribution of particles ejected from a point on the target (1). The insets show two different top views of the target during sputtering. The length of the vector with the direction specified by is a measure of the amount of material ejected in that direction. In both cases shown, the intensity of ejected particles is strongest in the forward direction toward the substrate and decreases with increasing angle .