Collimated Magnetron Sputter Deposition for Mirror Coatings
The mesh is mounted 48 mm from the target. The
circular data points show the rms roughness of multilayers comprised of 10 bilayers of
W/Si; the dashed red line is a guide to the eye. The multilayers have been
produced with different degrees of collimation provided by honeycomb mesh of
types 1–6, see Table 1. The number next to each data point refers to the mesh
type in Table 1 and the gray dashed line indicates the rms roughness of a
[W/Si] multilayer mirror produced with no collimation at all. The lower -axis indicates the total solid angle spanned
by the mesh while the upper -axis indicates the value of (see text). The square data points indicate
the coating rate associated with each mesh.
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