Collimated Magnetron Sputter Deposition for Mirror Coatings
Data from specular
reflectivity measurements of multilayers comprised of 10 bilayers of W/Si. The
substrates are commercially available Si wafers with an rms roughness of about
2.75 Å. For 4 different
pressures of Ar, the viewgraphs show (a) and (b)
the thickness of Si and W versus the opening angle . (c) The
fraction of Si versus the opening angle . (d) The
rms roughness versus the opening angle .
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