Collimated Magnetron Sputter Deposition for Mirror Coatings
Figure 2
(a) Two separator plates and one
curved substrate. The width of the separator plate (S in the sketch below) is
50 mm. (b) For clarity, in this side-view sketch, the chimney around the target has been
left out. The dimensions of the sputtering chamber limits the maximum width of
the separator plates to S = 62 mm.