Improving Critical Frequency of the Electrothermal V-Shaped Actuator Using the Particle Swarm Optimization Algorithm

Table 3

Optimal beam dimensions and critical frequencies at various driving voltages.

U (V)	Optimal beam dimensions			f C-opt.(Hz)	f C-nonopt.(Hz)	Y m (µm)
	L (µm)	(µm)	θ (°)
26	742	6.4	1.5	92.35	97.5	64.18
28	795	4.2	1.4	119.84	99.3	63.84
30	650	4	1.7	135.87	100.46	62.77
32	679	4	1.8	136.22	102.34	65.38
34	722	4	1.8	135.63	103.73	70.83