Improving Critical Frequency of the Electrothermal V-Shaped Actuator Using the Particle Swarm Optimization Algorithm

Table 1

Material properties of silicon.

d (kg/µm^3)	E (MPa)	k a (/µm·K)	C p (/kg·K)	ρ 0 (TΩ.µm)	λ (1/K)
2330 × 10^−18	169 × 10^3	2.57 × 10^4	7.12 × 10^14	230 × 10^−12	1.250 × 10^−3