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Shock and Vibration
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Shock and Vibration
/
2023
/
Article
/
Tab 1
/
Research Article
Improving Critical Frequency of the Electrothermal V-Shaped Actuator Using the Particle Swarm Optimization Algorithm
Table 1
Material properties of silicon.
d
(kg/
µ
m
3
)
E
(MPa)
k
a
(
/
µ
m·K)
C
p
(
/kg·K)
ρ
0
(TΩ.
µ
m)
λ
(1/K)
2330 × 10
−18
169 × 10
3
2.57 × 10
4
7.12 × 10
14
230 × 10
−12
1.250 × 10
−3