A Film Bulk Acoustic Resonator-Based Sensor with AlN Piezoelectric Material for Detecting Ethanol and Acetone

<table class="table-group" id="tab6"><tr><td><table class="table"><tr><td class="thead-hr" colspan="3"><hr/></td></tr><tr class="thead"><td class="align_left"> </td><td class="align_center">Acetone (kHz/ppm)</td><td class="align_center">Ethanol (kHz/ppm)</td></tr><tr><td class="thead-hr" colspan="3"><hr/></td></tr><tr><td class="align_left">AlN FBAR</td><td class="align_center">1.6</td><td class="align_center">3.9</td></tr><tr><td class="align_left">ZnO FBAR</td><td class="align_center">1.3</td><td class="align_center">1.6</td></tr><tr class="table-tr"><td colspan="3"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

<div>The AlN FBAR sensitivity compared with ZnO FBAR.</div>

Shock and Vibration

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Table 6

Table 6: A Film Bulk Acoustic Resonator-Based Sensor with AlN Piezoelectric Material for Detecting Ethanol and Acetone 