A Film Bulk Acoustic Resonator-Based Sensor with AlN Piezoelectric Material for Detecting Ethanol and Acetone

Table 5

The resonance frequency comparison of before and after adding ethanol solutions.

Voltage	Initial state (GHz)	Magnitude	After adding acetone (GHz)	Magnitude
+5 V	3.617	−29.4286	3.61593	−9.36744
+4 V	3.61691	−29.63381	3.61593	−9.35297
+3 V	3.61688	−29.49053	3.61587	−9.33251
+2 V	3.61681	−29.85427	3.61583	−9.32041
+1 V	3.61674	−30.07379	3.61579	−9.30655
0	3.61672	−29.7705	3.61571	−9.27577
−1 V	3.6167	−29.83415	3.61585	−9.31602
−2 V	3.61663	−29.83533	3.61575	−9.30397
−3 V	3.61658	−29.75886	3.61571	−9.28899
−4 V	3.61654	−29.84557	3.61568	−9.31822
−5 V	3.61646	−29.99142	3.61568	−9.29297