Research Article
A Film Bulk Acoustic Resonator-Based Sensor with AlN Piezoelectric Material for Detecting Ethanol and Acetone
Table 4
The resonance frequency comparison of before and after adding acetone solutions.
| | Voltage | Initial state (GHz) | Magnitude | After adding acetone (GHz) | Magnitude |
| | +5 V | 3.61532 | −14.29567 | 3.61559 | −8.0435 | | +4 V | 3.61536 | −14.3501 | 3.61553 | −8.04806 | | +3 V | 3.61528 | −14.40813 | 3.61547 | −8.05437 | | +2 V | 3.61532 | −14.50763 | 3.61545 | −8.05346 | | +1 V | 3.61517 | −14.7065 | 3.61543 | −8.05768 | | 0 | 3.6151 | −15.85078 | 3.61541 | −8.06339 | | −1 V | 3.61518 | −14.46039 | 3.61543 | −8.06564 | | −2 V | 3.61509 | −14.53756 | 3.61533 | −8.07524 | | −3 V | 3.61505 | −14.5795 | 3.61531 | −8.08173 | | −4 V | 3.61499 | −14.64694 | 3.61527 | −8.08585 | | −5 V | 3.6149 | −14.70183 | 3.61525 | −8.08964 |
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