A Film Bulk Acoustic Resonator-Based Sensor with AlN Piezoelectric Material for Detecting Ethanol and Acetone

<table class="table-group" id="tab3"><tr><td><table class="table"><tr><td class="thead-hr" colspan="4"><hr/></td></tr><tr class="thead"><td class="align_left" rowspan="2">Parameter</td><td class="align_center" colspan="3">Material</td></tr><tr class="thead"><td class="align_center">AlN</td><td class="align_center">Molybdenum</td><td class="align_center">Silicone</td></tr><tr><td class="thead-hr" colspan="4"><hr/></td></tr><tr><td class="align_left">Density (kg/m<sup>3</sup>)</td><td class="align_center">3200</td><td class="align_center">10000</td><td class="align_center">2300</td></tr><tr><td class="align_left">Young’s modulus (GPa)</td><td class="align_center">300</td><td class="align_center">314.26</td><td class="align_center">130</td></tr><tr><td class="align_left">Poisson’s ratio</td><td class="align_center"> </td><td class="align_center">0.31</td><td class="align_center">0.28</td></tr><tr class="table-tr"><td colspan="4"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

<div>The physical material parameters of the FBAR sensor.</div>

Shock and Vibration

tab3

Table 3

Table 3: A Film Bulk Acoustic Resonator-Based Sensor with AlN Piezoelectric Material for Detecting Ethanol and Acetone 