Research Article
A Film Bulk Acoustic Resonator-Based Sensor with AlN Piezoelectric Material for Detecting Ethanol and Acetone
Table 2
The photolithography parameters of the fabrication.
| | Which step | Photoresist | Exposure time |
| | Second step | Front side: AZ 5214 | Exposure 2 s—postbake 110°C
90 s—flood E 42 s | | Third step | Front side: AZ 5214 | Exposure 6.5 s, 45 s in developer | | Fourth step | Front side: AZ 5214 | Exposure 2 s—postbake 110°C
90 s—flood E 42 s | | Fifth step | Both side: AZ4620 | Exposure 22 s, 2 min in developer |
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