A Film Bulk Acoustic Resonator-Based Sensor with AlN Piezoelectric Material for Detecting Ethanol and Acetone

Table 1

The growth parameters comparison between AlN and Mo in sputtering process.

Parameters	AlN	Molybdenum
Nitrogen flow rate	100 sccm
Argon flow rate	20 sccm	22 sccm
Target power	6 kW	6 kW
Target voltage	190 V	545 V
Forward power	209.8 W	0.1 W
Reflected power	0.9 W	0.1 W
Load power	209.4 W	0.1 W
Cavity background vacuum	5e − 8 Torr	5e − 8 Torr