A Film Bulk Acoustic Resonator-Based Sensor with AlN Piezoelectric Material for Detecting Ethanol and Acetone

<div>The real-time frequency shift curves for acetone and ethanol detection. (a) The real-time frequency shift for acetone detection. (b) The real-time frequency shift for ethanol detection.</div>

Shock and Vibration

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Figure 16

Figure 16: A Film Bulk Acoustic Resonator-Based Sensor with AlN Piezoelectric Material for Detecting Ethanol and Acetone 