A Film Bulk Acoustic Resonator-Based Sensor with AlN Piezoelectric Material for Detecting Ethanol and Acetone

<div>The figure for influence of gate voltage change on the resonance frequency shift value during acetone experiment. The black curve <i>f</i><sub>1</sub> stands for the resonance frequency before acetone addition, the red curve <i>f</i><sub>2</sub> stands for the resonance frequency after acetone addition.</div>

Shock and Vibration

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Figure 11

Figure 11: A Film Bulk Acoustic Resonator-Based Sensor with AlN Piezoelectric Material for Detecting Ethanol and Acetone 