Synthesis and Characterization of Pb(Zr, Ti)O-Pb(Nb, Zn)O Thin Film Cantilevers for Energy Harvesting Applications
Figure 6
Electrical characterization of the PZT-PZN film on the released cantilever. (a) Capacitance versus Voltage curve, (b) calculated dielectric constant versus voltage curve, and (c) polarization versus voltage hysteresis curve.