Fabricating 90 nm Resolution Structures in Sol-Gel Silica Optical Waveguides for Biosensor Applications

Figure 3

SEM image of nanoimprinted sol-gel silica core. (a) Large area image of periodic structure. (b) Expanded view of periodic structure showing the grating with approximately 250 nm wide periodic structure and approximately 250 nm periodicity. (c) Approximately 90 nm wide periodic structure.

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