Research Article
Fabricating 90 nm Resolution Structures in Sol-Gel Silica Optical Waveguides for Biosensor Applications
Figure 1
Schematic of grating structure fabricated in sol-gel silica waveguide by using the nanoimprint method. The sol-gel silica core was deposited on the SiO2-Si substrate, following which the grating structure was nanoimprinted on the sol-gel silica core.