TY - JOUR A2 - Ahmad, Zubair AU - Enami, Yasufumi PY - 2017 DA - 2017/04/23 TI - Fabricating 90 nm Resolution Structures in Sol-Gel Silica Optical Waveguides for Biosensor Applications SP - 4198485 VL - 2017 AB - Bragg grating structure in a sol-gel silica waveguide is fabricated on the basis of nanoimprint lithography for biophotonic applications. The process realizes nonstandardized lithography in sol-gel silica at a high resolution for a relatively large area in the range of several micrometers with a resolution in the order of several nanometers. Here we demonstrate structures of 250 and 90 nm resolutions in a sol-gel silica optical waveguide for a large area that is not optimized to date. Bragg grating of a 250 nm periodic structure is realized for a 1 mm long area. SN - 1687-725X UR - https://doi.org/10.1155/2017/4198485 DO - 10.1155/2017/4198485 JF - Journal of Sensors PB - Hindawi KW - ER -