Principle Research on a Novel Piezoelectric 12-DOF Force/Acceleration Sensor

Table 5

Crossing coupling simulation results of static sensitivity in 6-axis force directions under external acceleration.

Load category	Crossing coupling
	Fx	Fy	Fz	Mx	My	Mz
Ax	357.5465%	−0.6633%	0.5882%	24.1290%	29.0320%	0.9147%
Ay	0.4468%	356.0423%	−0.3784%	−29.2919%	23.6266%	0.3112%
Az	−0.7484%	0.6213%	302.2579%	0.1503%	−0.0446%	3.6708%
αx	−0.5268%	−462.1897%	0.4869%	165.8323%	−26.1765%	0.0944%
αy	464.5818%	−0.9550%	0.5549%	27.3322%	166.1228%	0.6684%
αz	−0.0306%	−0.0394%	−23.1154%	0.1509%	0.2853%	793.7115%