Research Article
Modal Analysis of a Single-Structure Multiaxis MEMS Gyroscope
Table 3
Mechanical sensing parameters of the proposed design.
| Sensing parameters | Sense quality factor = 2500 |
| -gyro | Frequency () | Change in frequency ( | Stiffness () | Moment of inertia () | -gyro sensing spring | Length | Width |
| 13407 Hz | 101 Hz | Nm | kgm2 | 776 μm | 3.5 μm |
| -gyro | Frequency ( | Change in frequency ( | Stiffness () | Moment of inertia () | -gyro sensing spring | Length | Width |
| 13515 Hz | 209 Hz | Nm | kgm2 | 776 μm | 3.5 μm |
| -gyro | Frequency ( | Change in frequency ( | Stiffness () | Mass | -gyro sensing spring | Length | Width |
| 13515 Hz | 209 Hz | 43.8 N/m | kg | 174 μm | 3 μm |
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