Fracture Resistance Enhancement in Hard Mo-B-C Coatings Tailored by Composition and Microstructure

Table 1

Deposition conditions, chemical composition, and the thickness of the deposited coatings.

Coating type	Power [W]			Pressure [Pa]	Temperature [°C]	Bias [V]	Time [min]	Composition [at.%]			Thickness [m]
	Mo	B4C	C					Mo	B	C
A	110	128	250	0.1	40	-	480	52	24	24	1.2
B	110	128	250	0.1	500	-	480	52	24	24	1.5
C	91	128	278	0.1	40	−200	480	65	23	12	0.8