Research Article
Fracture Resistance Enhancement in Hard Mo-B-C Coatings Tailored by Composition and Microstructure
Table 1
Deposition conditions, chemical composition, and the thickness of the deposited coatings.
| Coating type | Power [W] | Pressure [Pa] | Temperature [°C] | Bias [V] | Time [min] | Composition [at.%] | Thickness [m] | Mo | B4C | C | Mo | B | C |
| A | 110 | 128 | 250 | 0.1 | 40 | - | 480 | 52 | 24 | 24 | 1.2 | B | 110 | 128 | 250 | 0.1 | 500 | - | 480 | 52 | 24 | 24 | 1.5 | C | 91 | 128 | 278 | 0.1 | 40 | −200 | 480 | 65 | 23 | 12 | 0.8 |
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