Investigation of the Influence of Ni Doping on the Structure and Hardness of Ti-Ni-C Coatings

Table 3

Overview of the coatings prepared by HiPIMS.

C (at. %)	Lattice parameter (Å)	Grain size (nm)	a-C:H phase (%)	MGS (nm)	Hardness (GPa)
Ni-free
25.0	4.2502	36.5			15.1 ± 1.3
40.0	4.2950	24.1	5.8	0.221	34.5 ± 2.5
49.0	4.3180	27.9	14.1	0.671	38.3 ± 2.7
53.0	4.3216	22.4	16.6	0.650	40.0 ± 3.0
57.0	4.3130	10.0	25.2	0.483	44.7 ± 3.8
68.0	4.2890	5.5	55.4	0.873	31.5 ± 3.6
Ni-doped
22.9	4.2600	4.3	5.7	0.043	17.3 ± 0.8
33.8	4.3033	5.5	8.6	0.084	26.8 ± 2.1
36	4.3118	7.5			33.8 ± 1.5
47.7	4.3185	15.5	12.1	0.341	38.2 ± 4.1
50.7	4.3120	1.6	13.9	0.041	33.6 ± 4.4
63	4.2982	3.0	37.0	0.264	24.6 ± 4.1
77.2	4.2930	2.0	70.2	0.576	20.4 ± 1.7