Investigation of the Influence of Ni Doping on the Structure and Hardness of Ti-Ni-C Coatings

Table 2

Overview of the coatings prepared by DCMS.

C (at. %)	Lattice parameter (Å)	Grain size (nm)	a-C:H phase (%)	MGS (nm)	Hardness (GPa)
Ni-free
29.5	4.2761	26.6	17.2	0.799	11.4 ± 0.8
38.4		20.6
39.3	4.3233	17.8	26.4	0.904	20.7 ± 1.6
49.0	4.3578	27.5	29.0		24.4 ± 1.8
53.4	4.3634	17.8	13.7		33.3 ± 4.3
55.9	4.3547	20.7	25.7	1.016	26.8 ± 1.2
61.3	4.3483	14.4	34.8	1.065	26.8 ± 2.7
65.1	4.3405	4.2	66.5	0.991	21.2 ± 2.5
Ni-doped
28.8	4.3010	5.5	2.6	0.025	20.0 ± 1.1
36.9	4.3391	8.8	14.2	0.248	19.0 ± 1.9
39.4	4.3521	12.9	3.8	0.088	23.4 ± 2.3
41.9	4.3601	21.8	13.3	0.562	29.1 ± 3.1
46.3	4.3678	19.2	11.3	0.404	25.8 ± 2.3
50.5	4.3411	23.4	32.9		24.2 ± 2.2
52.4	4.3472
52.9		20.1	14.3	0.556	23.9 ± 2.6
56.5	4.3419	11.2	41.4		30.6 ± 1.8
57.5	4.3450	9.2	39.7		29.9 ± 2.0
57.8	4.3489	7.8	44.8		22.6 ± 3.5
64.4	4.3432	6.1	40.2	0.609	21.4 ± 1.9
66.4	4.3229	4.1	54.8	0.688	27.5 ± 2.3