Research Article
Investigation of the Influence of Ni Doping on the Structure and Hardness of Ti-Ni-C Coatings
Table 1
Parameters of the coatings deposition.
| | DCMS | HiPIMS |
| Mean power (kW) | 1.25 | 1.25 | Pulse length (s) | — | 400 | Pulse frequency (Hz) | — | 30 | Maximal current (A) | ~2.5 | ~400 | Substrate bias (V) | −100 | — | Argon flow rate (sccm) | 20 | 20 | Deposition duration (min) | 60 | 120 |
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