Research Article

Investigation of the Influence of Ni Doping on the Structure and Hardness of Ti-Ni-C Coatings

Table 1

Parameters of the coatings deposition.

DCMSHiPIMS

Mean power (kW)1.251.25
Pulse length (s)400
Pulse frequency (Hz)30
Maximal current (A)~2.5~400
Substrate bias (V)−100
Argon flow rate (sccm)2020
Deposition duration (min)60120