Effect of Solution Spray Rate on the Properties of Chemically Sprayed ZnO:In Thin Films

Table 1

The effect of the solution spray rate on the sprayed ZnO:In film thickness (𝑡), crystallite size (𝑑), average grain size (𝐷), electrical resistivity (𝜌), main carrier mobility (μ), carrier concentration (𝑛), and optical band gap (𝐸_𝑔). Soda-lime and borosilicate glasses are designated as Na-gl and B-gl, respectively.

Spray rate, mL/min	𝑉, mL	Substrate	𝑡, nm	𝑑, nm	𝐷, nm	𝜌, Ωcm	μ, cm^2/Vs	𝑛, cm^−3	𝐸𝑔, eV
0.5	100	Na-gl	700	22	~100	6.3⋅10^−2	4.4	2.3·10^19	3.28
0.5	150	Na-gl	1400	26	~250	3.3⋅10^−2	9.2	2.1·10^19	3.24
0.5	150	B-gl	1350	26	*n.m.	7.8⋅10^−2	3.9	2.0·10^19	3.24
1.5	100	Na-gl	900	21	~120	1.2⋅10^−2	7.7	6.9·10^19	3.31
1.5	150	Na-gl	1400	29	~250	7.3⋅10^−3	11	7.6·10^19	3.27
3.3	100	Na-gl	1100	34	~250	3.7⋅10^−3	16	1.1·10^20	3.34
4.7	100	Na-gl	1100	35	~250	3.2⋅10^−3	15	1.4·10^20	3.36
6.7	100	Na-gl	1350	36	~250	4.6⋅10^−3	12	1.2·10^20	3.32

∗n.m.: not measured.