Quantitative Analysis of Silicon Tetrachloride, Carbon Disulfide, and Dichloroethane Concentration by Raman Spectroscopy

Table 3

RSEP of SiCl₄ and CS₂ concentration for the SiCl₄-CS₂ binary system by quantitative analysis at different characteristic peaks.

	SiCl4 (422 cm^−1)		CS2 (654 cm^−1)
Actual concentration (%)	3.41	8.30	15.12	6.76
Estimated concentration (%)	3.63	8.53	15.74	7.06
RSEP (%)	3.55		4.16