Quantitative Analysis of Silicon Tetrachloride, Carbon Disulfide, and Dichloroethane Concentration by Raman Spectroscopy

Table 2

RSEP of SiCl₄ and C₂H₄Cl₂ concentration for the SiCl₄-C₂H₄Cl₂ binary system by quantitative analysis at different characteristic peaks.

	SiCl4 (422 cm^−1)		C2H4Cl2 (754 cm^−1)		C2H4Cl2 (2968 cm^−1)
Actual concentration (%)	2.78	6.59	9.28	4.04	9.28	4.04
Estimated concentration (%)	2.69	6.41	9.19	4.24	9.91	4.43
RSEP (%)	2.81		2.17		7.32