Quantitative Analysis of Silicon Tetrachloride, Carbon Disulfide, and Dichloroethane Concentration by Raman Spectroscopy

Table 1

Details of Raman peaks in Figure 1.

Raman peak in Figure 1(cm^−1)	Attribution	Substance
654	Vibrating mode of C-S	CS2
422 and 480	Vibrating modes of Si-Cl	SiCl4
300	Deformation vibration of C-C-Cl	C2H4Cl2
754	Stretching vibration of C-Cl
1204	Twisting vibration of C-H2
1301	Wagging vibration of C-H2
1431	Scissoring vibration of C-H2
2968	Symmetrical stretching vibration of C-H2