Quantitative Analysis of Silicon Tetrachloride, Carbon Disulfide, and Dichloroethane Concentration by Raman Spectroscopy

Figure 3

Calibration curve for the determination of silicon tetrachloride for the SiCl₄-C₂H₄Cl₂ binary system at 422 cm⁻¹ (■: standard solution used to establish calibration curve; □: standard solution used to verify the accuracy of the calibration curve).