Research Article

Quantitative Analysis of Silicon Tetrachloride, Carbon Disulfide, and Dichloroethane Concentration by Raman Spectroscopy

Figure 2

Raman spectra of the standard solutions for the SiCl4-C2H4Cl2 binary system: (a) the characteristic peak of carbon disulfide at 654 cm−1, (b) the characteristic peak of silicon tetrachloride at 422 and 480 cm−1, (c) the characteristic peak of dichloroethane at 754 cm−1, and (d) the characteristic peak of dichloroethane at 2968 cm−1.
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