Research Article
Monocrystalline Silicon PERC Solar Cell with Rear-Side AlOx Film Formed by Furnace Oxidation
Table 1
Lifetimes measured after first annealing at 400°C with a time duration of 10 minutes, back-side SiNx deposition, and after second annealing at various temperatures with a time duration of 10 or 20 minutes. The recovery percentage is defined as the ratio of the lifetime after the second annealing to that after the first annealing.
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