Controlled Crystallinity of TiO₂ Layers Grown by Atmospheric Pressure Spatial Atomic Layer Deposition and their Impact on Perovskite Solar Cell Efficiency

Table 1

Summary of measured and modeled structural and optical properties.

	Temperature (°C)	AFM	SE model					UV-Vis	KP	UPS
		RMS (nm)	Roughness (nm)	Thickness (nm)	GPC (nm/cycle)	MSE	(530)	Egap (eV)	WF (eV)	WF (eV)	VBM (eV)
H2O	100	1.2	1.7	89.9	0.09	0.7	2.07	3.53	-4.58	-4.54	-7.41
	150	0.9	1.9	82.4	0.08	0.6	2.19	3.53	-4.58	-4.72	-7.51
	200	1.1	2.9	84.4	0.08	0.6	2.37	3.51	-4.65	-4.54	-7.26
	250	10.0	7.5	105	0.11	3.8	2.54	3.49	-4.65	-4.74	-7.46
	300	8.5	11.9	114.5	0.11	3.9	2.53	3.45	-4.70	-4.73	-7.46
	350	11.2	11.6	111.7	0.11	4.5	2.54	3.36	-4.70	-4.76	-7.55
O3	100	—	2	89.5	0.09	1.2	2.07	3.49	-4.59	-4.73	-7.59
	150	0.8	1.7	75.6	0.08	1.1	2.21	3.50	-4.47	-4.72	-7.52
	200	1.0	1.6	53.3	0.05	0.7	2.40	3.45	-4.48	-4.71	-7.40
	250	2.3	1.9	59.4	0.06	1.6	2.56	3.34	-4.70	-4.70	-7.38
	300	12.6	3.1	89.4	0.09	6.0	2.55	3.43	-4.62	-4.77	-7.54
	350	13.9	5.1	86.1	0.09	6.2	2.57	3.30	-4.67	-4.77	-7.46