Controlled Crystallinity of TiO<sub>2</sub> Layers Grown by Atmospheric Pressure Spatial Atomic Layer Deposition and their Impact on Perovskite Solar Cell Efficiency

<div>Raman spectra of fabricated TiO<sub>2</sub> layers for (a) H<sub>2</sub>O and (b) O<sub>3</sub> as reactant and 2000 deposition cycles. Layers are analyzed for anatase (A) and rutile (R) crystal structure. Distinct signals for anatase are observed for temperatures of at least 250°C and 300°C for H<sub>2</sub>O and O<sub>3</sub> as reactant, respectively.</div>

International Journal of Photoenergy

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Figure 5

Figure 5: Controlled Crystallinity of TiO<sub>2</sub> Layers Grown by Atmospheric Pressure Spatial Atomic Layer Deposition and their Impact on Perovskite Solar Cell Efficiency 

Figure 5 | Controlled Crystallinity of TiO2 Layers Grown by Atmospheric Pressure Spatial Atomic Layer Deposition and their Impact on Perovskite Solar Cell Efficiency 