Controlled Crystallinity of TiO<sub>2</sub> Layers Grown by Atmospheric Pressure Spatial Atomic Layer Deposition and their Impact on Perovskite Solar Cell Efficiency

<div>SEM images of TiO<sub>2</sub> layers on Si fabricated between 100°C and 350°C with H<sub>2</sub>O (a) and O<sub>3</sub> (b) as reactant and 1000 deposition cycles.</div>

International Journal of Photoenergy

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Figure 3: Controlled Crystallinity of TiO<sub>2</sub> Layers Grown by Atmospheric Pressure Spatial Atomic Layer Deposition and their Impact on Perovskite Solar Cell Efficiency 

Figure 3 | Controlled Crystallinity of TiO2 Layers Grown by Atmospheric Pressure Spatial Atomic Layer Deposition and their Impact on Perovskite Solar Cell Efficiency 