Excellent Silicon Surface Passivation Achieved by Industrial Inductively Coupled Plasma Deposited Hydrogenated Intrinsic Amorphous Silicon Suboxide

<table>Optical bandgap as a function of process temperature. The line is a guide for the eye. A linear dependence of bandgap on temperature can be observed.</table>

International Journal of Photoenergy

fig10

Figure 10

Figure 10: Excellent Silicon Surface Passivation Achieved by Industrial Inductively Coupled Plasma Deposited Hydrogenated Intrinsic Amorphous Silicon Suboxide 

Figure 10 | Excellent Silicon Surface Passivation Achieved by Industrial Inductively Coupled Plasma Deposited Hydrogenated Intrinsic Amorphous Silicon Suboxide 