Nanopatterned Silicon Substrate Use in Heterojunction Thin Film Solar Cells Made by Magnetron Sputtering

Figure 5

Side-view SEM images of NPSiS wafer following magnetron sputtering deposition on four NPSiS wafers. (a) NPSiS-1 HJT cell, (b) NPSiS-2 HJT cell, (c) NPSiS-3 HJT cell, (d) NPSiS-4 HJT cell, and (e) reflectance spectra of NPSiS HJT cells and nontextured HJT cell.

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