Research Article
Optimization of Recombination Layer in the Tunnel Junction of Amorphous Silicon Thin-Film Tandem Solar Cells
Table 1
The deposition conditions of intrinsic layer of the tandem solar cell.
| Parameter | Value |
| Power (W) | 10 | Pressure (Pa) | 90 | E/S distance (mm) | 30 | Substrate temperature (°C) | 200 | SiH4 flow rate (sccm) | 40 | H2 flow rate (sccm) | 160 | i2/i1 thickness ratio | 2–10 |
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