Research Article
Low Actuation Voltage RF MEMS Switch Using Varying Section Composite Fixed-Fixed Beam
Table 8
Comparison of Pull in Voltages.
| Device | Pull in Voltage (Volts) (By Simulation) | Pull in Voltage (Volts) (Analytical) | % Error |
| VSC1 | 173.75 | 155.57 | 10.46 | VSC2 | 148.175 | 132.29 | 10.72 | VSC3 | 129.985 | 115.88 | 10.85 | VSC4 | 119.575 | 106.26 | 11.13 |
| VSC5 | 47.2 | 42.32 | 10.33 | VSC6 | 40.38 | 36.1 | 11.85 | VSC7 | 35.48 | 31.69 | 10.68 | VSC8 | 32.65 | 29.1 | 10.87 |
|
|