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International Journal of Microwave Science and Technology
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Special Issues
International Journal of Microwave Science and Technology
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2012
/
Article
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Fig 6
/
Research Article
Copper-Metalized GaAs pHEMT with Cu/Ge Ohmic Contacts
Figure 6
SEM images of the surface of ohmic contacts which have undergone thermal treatment at
𝑇
=
4
0
0
∘
C
under vacuum (a) in a flow of atomic hydrogen (b); magnification 15,000x.
(a)
(b)