Optical and Electrical Properties of Magnetron Sputtering Deposited Cu–Al–O Thin Films

Figure 4

XPS spectra of Cu–Al–O thin films obtained with 𝑟_Cu/Al of 45%: (a) Cu 2p spectra; (b) fitting spectra of Cu2p_3/2; (c) fitting spectra of Al 2p and Cu 3p.

(a)

(b)

(c)