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| BioMEMS platform | Main components | Fabrication strategy | Mechanism of operation | Specifics | Ref. |
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| Centrifugal microfluidic chip | Microfluidic chip
Acrylic plastic plates with silicon tubes
Filtering channels
Focusing channels
Trapping channels | Lithography methods
Standard photolithography technique | The device applied centrifugal force to isolate the cells. | The device does not need large equipment for cell manipulation. | [31] |
| Planar p-DEP chip | P-DEP chip
TPIDA electrodes (A-IDA and B-IDA electrodes)
Microfluidic channels
Microwell array | Cells were trapped by applying AC signal into the electrodes. The paired cells in each microwell could be pushed together into a U-shaped microbaffle by liquid flow through a capillary-sized channel, resulting in single isolation and subsequent cell-cell contact. | The device is facile and accurate. | [32] |
3D cell rotation
BioMEMS platform | V-shaped pillars
Microchannels
C-PDMS electrodes
ITO electrode
Controllable 3D cell rotation | Photolithography and wet etching methods | Cell medium would be streamed along with the flow, and only one cell was trapped at the opening of the V-shaped pillars, subsequently back-flowed, and stabilized inside the chamber. | The strategy offered a low-cost device with straightforward approach that had a better control over cell trapping and isolation. | [34] |
| Flow-through LOC | Gold electrodes
PDMS microfluidic channel
DEP trap | Standard photolithography and lift-off techniques | Cells were trapped at the constant flow with the continuous application of the electric field. The n-DEP allowed trapping the cells independent of gravity. | The device offered control over unwanted lysis. It involved simultaneous n-DEP trapping and AC electroporation. | [30] |
| Microfluidic cell trap array | Microfluidic channel
Hydrodynamic sieve-like trap system | Photolithography technique | The cells were flowed in, and single cells were trapped on the protein micropatterns by the sieve-like traps. | The device used passive trapping suitable for preserving cell viability. | [35] |
| Microfluidic device with integrated pipettes | Microfluidic network of 60 loops
Bypass channel
Cavities
Trap
Pipettes | Soft lithography process | The cell-drug mixture was injected into the grid, and the device trapped individual cells within the array of cavities and immobilized them. | The devices presented control over the distribution of cells/clusters. It involves a downstream assay for capturing rare CTCs. | [36] |
| Microfluidic device | Syringe pump
Magnetic stirring bar
Micropillar array
Fluorescence microscope | Photolithography and soft lithography techniques | The cells were kept in suspension through a magnetic stirring bar, while the cell mixture or blood sample was pumped through the device. | It is a noninvasive device for monitoring the response to cancer treatments. | [37] |
| 1D cell migratory assay | Hydrodynamic trap microfluidic channels
Microtracks
Stamped substrates
Laser ablated substrates | Multilayer photolithography process | Cells were seeded at low flow rate onto the patterned microtracks and trapped by hydrodynamic barriers. | Microtracks allowed guiding cell migration with high predictability and precise positioning. | [38] |
| Semiautomated microfluidic cell-based biosensor | Fluid channels
Pneumatic valves
Fluid crossed-channel structure
Control channels | Rapid prototyping technique | A controllable pneumatic trap was used to encapsulate and discharge suspended cells. | In this device, the chemical stimulation to cell was achieved by flexible hydrodynamic gating. | [39] |
| Hydrodynamic Snaring Array | V-shaped weirs
U-shape dwelling region
Microcultivation system
96-well plates | Microelectrochemical process, inductively coupled plasma etching, and photolithography | Single cells were trapped and manipulated within a high flow and low-pressure area that reconcentrated the streamline via a V-shaped weir that loaded the cells, pushing them precisely into the dwelling region due to the void and wedge structures. | The device is capable of trapping single cells in 10 s. Additionally, it allows for long-term cultivation. | [40] |
| Porous-microwell trapping-system | Sieved microwell array
Microfluidic two-layered channel | Slit channel lithography | Particles were directed along the top channel and captured in the microwells. A shielding flow along the sides of the top channel was used to guide the flow directly over the wells, and untrapped particles were sieved along the flow path. | In this device, well occupancy and trapping were improved. | [41] |
| Polymer-based porous microcapsules | Microcapsules with shells and asymmetrical distributed funnel-shaped pores | Droplet microfluidic technology and chemical phase separation process | The pores’ geometry and bacteria’s motility drive the bacteria to enter the microcapsule cavity. | The surrounding liquid environment safeguards the bacteria while adding bactericide into the cavities greatly enhanced the efficiency of the system. | [42] |
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