Fabrication and Evaluation of Large Area Mo/Si Soft X-Ray Multilayer Mirrors at Indus SR Facilities
Figure 3
Measured and fitted XRR profile at Cu Kα wavelength (λ = 1.54 Å) for Mo/Si MLs. ML-3 has and d = 68 Å and ML-4 has and d = 93.4 Å. The best fit results are given in Table 2.
