Study of Electrical Conductivity and Microcosmic Structure of Tetrahedral Amorphous Carbon Films Doped by Boron

Table 1

Test results of samples’ resistivity.

Test point	1	2	3	4	5	6	7	Average
Resistivity of ta-C film without doping (Ω⋅cm)
Resistivity of ta-C:B film with thermal diffusion doping 5 min (Ω⋅cm)
Resistivity of ta-C:B film with thermal diffusion doping 10 min (Ω⋅cm)
Resistivity of ta-C:B film with thermal diffusion doping 15 min (Ω⋅cm)
Resistivity of ta-C:B film with thermal diffusion doping 20 min (Ω⋅cm)