Study of Electrical Conductivity and Microcosmic Structure of Tetrahedral Amorphous Carbon Films Doped by Boron

Figure 2

Fitting curve of C1s energy level spectrogram of ta-C film before and after boron doping.

(a) ta-C film without doping

(b) ta-C:B film with thermal diffusion doping 5 min

(c) ta-C:B film with thermal diffusion doping 10 min

(d) ta-C:B film with thermal diffusion doping 15 min

(e) ta-C:B film with thermal diffusion doping 20 min