Study of Electrical Conductivity and Microcosmic Structure of Tetrahedral Amorphous Carbon Films Doped by Boron

Figure 1

Fitting curve of B1s core level spectrogram of ta-C:B film with different thermal diffusion times.

(a) Thermal diffusion doping 5 min

(b) Thermal diffusion doping 10 min

(c) Thermal diffusion doping 15 min

(d) Thermal diffusion doping 20 min