Advances in Materials Science and Engineering / 2008 / Article / Fig 5

Research Article

Estimation of Compositions of Zr-Cu Binary Sputtered Film and Its Characterization

Figure 5

Changes of Cu intensity in spectral diffraction of Cu-Zr sputtered films on discharge time in sputtering when using Cu chips on Zr plate and Zr chips on Cu plate composite targets.
518354.fig.005

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