Estimation of Compositions of Zr-Cu Binary Sputtered Film and Its Characterization

<table>Changes of Cu intensity in spectral diffraction of Cu-Zr sputtered films on discharge time in sputtering when using Cu chips on Zr plate and Zr chips on Cu plate composite targets.</table>

Advances in Materials Science and Engineering

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Figure 5

Figure 5: Estimation of Compositions of Zr-Cu Binary Sputtered Film and Its Characterization 